Example of a residual gas analysis (RGA) of an L-509 linear stage suitable for high vacuum.
Example of a pumping-down curve of an L-509 linear stage suitable for high vacuum. After pumping for 48 h, a pressure in the order of 10-7 hPa is reached.
Y-MIC-12xx
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Individual and detailed test setup
Upon request, additional measurements can be performed at PI in order to determine in detail the performance values of the products and to verify these individually. This allows the necessary measurement data to be compiled and individually documented for the specific application using different parameters.
Additional measurements for precision, geometry, and dynamics
Interferometers can be used to measure and individually verify product surfaces as well as dynamics and motion profiles of combined products.
Additional measurements in a vacuum environment
For products suitable for vacuum, residual gas analyses (RGA) can be performed in vacuum chambers with a volume of 10 l or 240 l. For this purpose, the pressure in the chamber is recorded during the entire test. The RGA (0 - 200 amu) is performed at the end of the test. The pressure curve of the individual phases (pumping down, bakeout, cooling down) as well as the RGA spectrum are provided as a result. Upon request, additional RGA spectra, e.g. after pumping down or after bakeout, can be recorded.
Measurement logs are only available for specific products. For more information, contact our customer service department.
