Y-MIC-12xx

OLD PRODUCT (see Quote / Order for replacements)

Additional Proof for Precision, Dynamics, and Suitability for Vacuum

Measurement of position, pitch, yaw, straightness, and flatness
Dynamic measurement of the minimum incremental motion and velocity
High and ultrahigh vacuum measurement (HV & UHV), in up to 240 l chambers

Example of a residual gas analysis (RGA) of an L-509 linear stage suitable for high vacuum.

Example of a pumping-down curve of an L-509 linear stage suitable for high vacuum. After pumping for 48 h, a pressure in the order of 10-7 hPa is reached.

Upon request, additional measurements can be performed at PI in order to determine in detail the performance values of the products and to verify these individually. This allows the necessary measurement data to be compiled and individually documented for the specific application using different parameters.

Interferometers can be used to measure and individually verify product surfaces as well as dynamics and motion profiles of combined products.

For products suitable for vacuum, residual gas analyses (RGA) can be performed in vacuum chambers with a volume of 10 l or 240 l. For this purpose, the pressure in the chamber is recorded during the entire test. The RGA (0 - 200 amu) is performed at the end of the test. The pressure curve of the individual phases (pumping down, bakeout, cooling down) as well as the RGA spectrum are provided as a result. Upon request, additional RGA spectra, e.g. after pumping down or after bakeout, can be recorded.

Measurement logs are only available for specific products. For more information, contact our customer service department.

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Motion and positioning	X-365	Note
Payload	10 kg to 15 kg
Travel range in X	200 mm, 400 mm, 600 mm, 800 mm	X: Gantry axis
Travel range in Y	200 mm, 400 mm, 600 mm	Y: Bridge axis
Minimum incremental motion in X, Y	0.1 µm
Bidirectional repeatability	±0.5 µm	Per axis, ≥ 2 σ
Positioning accuracy, calibrated	±1 µm	Per axis, achieved with 1D mapping of X and Y axis
Orthogonality X to Y	< 35 µrad
Straightness in X	20 µm	Straightness error E_YX
Straightness in Y	10 µm	Straightness error E_XY
Flatness in X	10 µm	Straightness error E_ZX
Flatness in Y	20 µm	Straightness error E_ZY
Sensor	Absolute encoder	No risk of collision at startup
Sensor resolution	1 nm
Drive properties	X-365	Note
Max. velocity in X, unloaded ǀ loaded*	2 m/s I 1.4 m/s	With G-901.RA5486B
Velocity in continuous operation in X, unloaded I loaded*	1.25 m/s ǀ 0.65 m/s
Max. velocity in Y, unloaded I loaded*	2.5 m/s I 1.2 m/s	With G-901.RA5486B
Velocity in continuous operation in Y, unloaded I loaded*	2.5 m/s ǀ 0.75 m/s
Max. acceleration in X, unloaded ǀ loaded*	15 m/s2 ǀ 10 m/s2
Acceleration in continuous operation in X, unloaded ǀ loaded*	12.5 m/s2 ǀ 6.5 m/s2
Max. acceleration in Y, unloaded I loaded*	25 m/s2 ǀ 12 m/s2
Acceleration in continuous operation in Y, unloaded ǀ loaded*	25 m/s2 ǀ 7.5 m/s2
Max. drive force in X, unloaded ǀ loaded*	430 N ǀ 430 N
Drive force in continuous operation in X, unloaded ǀ loaded*	135 N ǀ 135 N
Max. drive force in Y, unloaded ǀ loaded*	70 N ǀ 260 N
Drive force in continuous operation in Y, unloaded ǀ loaded*	35 N I 85 N
Environment	X-365	Note
Environment	Default	Ambient pressure at 22 ±0.5 °C
Lifetime	2 years	In 24/7 operation, at full duty cycle
Controller	X-365	Note
High-end	G-901.RA5486B	To achieve all specification values
Default	G-901.RA5197	To achieve most specification values
Cost-optimized	ECMma	ACS integrated motion controller

* Values valid for maximum load (15 kg)

The available motion platform is directly compatible with L-509, L-511, V-611, and L-611 positioners and includes space for managing cables for additional sensors, encoders, and other positioners from PI or third-party providers.

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