Y-MIC-12xx

OLD PRODUCT (see Quote / Order for replacements)

Additional Proof for Precision, Dynamics, and Suitability for Vacuum

Measurement of position, pitch, yaw, straightness, and flatness
Dynamic measurement of the minimum incremental motion and velocity
High and ultrahigh vacuum measurement (HV & UHV), in up to 240 l chambers

Example of a residual gas analysis (RGA) of an L-509 linear stage suitable for high vacuum.

Example of a pumping-down curve of an L-509 linear stage suitable for high vacuum. After pumping for 48 h, a pressure in the order of 10-7 hPa is reached.

Upon request, additional measurements can be performed at PI in order to determine in detail the performance values of the products and to verify these individually. This allows the necessary measurement data to be compiled and individually documented for the specific application using different parameters.

Interferometers can be used to measure and individually verify product surfaces as well as dynamics and motion profiles of combined products.

For products suitable for vacuum, residual gas analyses (RGA) can be performed in vacuum chambers with a volume of 10 l or 240 l. For this purpose, the pressure in the chamber is recorded during the entire test. The RGA (0 - 200 amu) is performed at the end of the test. The pressure curve of the individual phases (pumping down, bakeout, cooling down) as well as the RGA spectrum are provided as a result. Upon request, additional RGA spectra, e.g. after pumping down or after bakeout, can be recorded.

Measurement logs are only available for specific products. For more information, contact our customer service department.

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Drive type			DC motor			Stepper motor
Spindle pitch [mm]			1	2	5	1	2	5
Maximum velocity in X, unloaded [mm/s]			50	100	250	20	40	100
Acceleration [m/s2]			0.9	1.7	3.5	0.7	1.4	3.2
Minimum incremental motion in X (max.) [µm]	Encoder	1Vpp	0.05	0.1	0.2	0.05	0.1	0.2
		RS-242	0.5	0.5	0.5	0.5	0.5	0.5
		Rot.	2	5	10
		None				2	5	10
Unidirectional repeatability in X (max.) [µm]	Encoder	1Vpp	0.5	0.5	1	0.5	0.5	1
		RS-242	0.5	0.5	1	0.5	0.5	1
		Rot.	2	2	5
		None				5	5	10
Bidirectional repeatability in X (max.) [µm]	Encoder	1Vpp	1	1	2	1	1	2
		RS-242	1	1	2	1	1	2
		Rot.	5	5	10
		None				10	10	20
Drive type	DC motor			Stepper motor
Spindle pitch [mm]	1	2	5	1	2	5
Drive force in direction of motion in X [N]	100	50	20	100	100	40
Holding force in X, passive [N]				50	40	20
Permissible force in Z [N]	100*	100*	100*	100*	100*	100*
Permissible force in Y [N]	100	100	100	100	100	100
Permissible force in X [N]	100	50	20	100	100	40
Permissible torque in θX [Nm]	30	30	30	30	30	30
Permissible torque in θY [Nm]	20	20	20	20	20	20
Permissible torque in θZ [Nm]	20	20	20	20	20	20
Holding brake	Optional for DC motor. Holding force 50 N.
Drive screw type	Ball screw drive
Guide	Recirculating linear ball bearing
Moved Mass [g]	Depends on configuration
Travel range in X [mm]	50	100	150	200	250	300
Flatness (linear crosstalk in Z with motion in X) [µm]	5	7	9	10	11	12
Straightness (linear crosstalk in Y with motion in X) [µm]	5	7	9	10	11	12
Yaw (rotational crosstalk in θZ with motion in X) [µrad]	100	150	175	200	225	250
Pitch (rotational crosstalk in θY with motion in X( [µrad]	100	150	175	200	225	250
Integrated sensor	Linear encoder	Linear encoder	Rotational encoder	Open loop
Sensor signal	1 Vpp	RS-422	RS-422	None
Sensor resolution	Depends on controller setting	80 nm	1024 pulses per revolution
Sensor signal period	80 µm	80 µm	6.136 µrad
Reference switch	Reflective optical sensor	Reflective optical sensor	Index pulse of magnetic encoder
Reference switch repeatability	1 µm
Internal limit switches	Hall-effect switch
Internal limit switch repeatability	1 μm
External limit switches	Inductive proximity sensor
External limit switches repeatability	40 μm
Stiffness in X [N/μm]	5
Stiffness in Y [N/μm]	5
Stiffness in Z [N/μm]	5
Stiffness in θX [μrad/Nm]	20
Stiffness in θY [μrad/Nm]	25
Stiffness in θZ [μrad/Nm]	20
Integrated Sensor	Linear Encoder	Linear Encoder
Drive Type	DC Motor	Stepper Motor
Nominal voltage [V]	24	24
Peak voltage [V]	24	24
Nominal current, RMS [A]	1.69	1
Peak current, RMS [A]	8.18
Motor resolution [Steps/rev.]		200
Torque constant [mNm/A]	36.9
Resistance phase-phase [Ohm]	2.85	5.3
Inductance phase-phase [mH]	0.373	12.5
Back EMK, rotational [V/kRPM]	4	48
Number of pole pairs	1
Motor constant, rotational [mNm/A]	36.9
Material	Aluminium, steel, and more
Sensor connector	HD D-Sub 26 (m)
Motor connector	HD D-Sub 26 (m)
Recommended controllers/drivers	C-863 (DC, RS422)C-663 (2SM, RS422)Modular ACS-ControllerBeckhoff Terminals
Operating temperature	10 °C to 50 °C
Storage temperature	0 °C to 70 °C
Transport temperature	0 °C to 70 °C
Air pressure	80 kPa to 110 kPa
Maximum altitude	2000 m
Protection class	IP20
Travel range	50		100		150		200
Gewicht von bis je nach Ausstattung	1.9	2.18	2.13	2.41	2.37	2.6	2.6	2.89
Item	Model No. (note 2)	Type		NPN output			PNP output
		Front sensing	GX-F8A(I)		GX-F8B(I)	GX-F8A(I)-P		GX-F8A(I)-p
		Top sensing	GX-H8A(I)		GX-H8B(I)	GX-F8A(I)-P		GX-F8A(I)-p
Max operation distance (Note 3)			2.5 mm (0.008 in) ± 8 %
Stable sensing range (Note 3)			0 to 2.1 mm (0 to 0.083 in)
Standard sensing object			Iron sheet 15 × 15 × t 1 mm (0.591 × t 0.039 in)
Hysteresis			20 % or less of operation distance (with standard sensing object)
Repeatability			Along sensing axis, perpendicular ti sensing axis: 0.04 mm (0.0016 in) or less
Supply voltage			12 to 24 V DC +10 %/-15 % Ripple P-P 10 % or less
Current consumption			15 mA or less
Output			NPN open-collector transistor Maximum sink current: 100 mA Applied voltage: 30 V DC or less (between output and 0 V) Residual voltage: 2 V or less (at 100 mA sink current)			PNP open-collector transistor Maximum source current: 100 mA Applied voltage: 30 V DC or less (between output and +V) Residual voltage: 2 V or less (at 100 mA source current)
	Utilization Category		DC-12 or DC-13
	Output operation		Normally open		Normally closed	Normally open		Normally closed