H-811.I2 Miniature Hexapod
Fast, Compact, and Highly Precise
- Travel ranges to ±17 mm / ±21°
- Payload to 5 kg
- Repeatability to ±0.06 µm
- Velocity to 20 mm/s
- Vacuum model available







Application fields
Thanks to its small footprint and its proven reliability in applications with high numbers of cycles, the H-811 is typically employed in photonics and in precision assembly. In such areas, it contributes to boosting the productivity of complex manufacturing processes and measuring procedures.
High dynamics combined with extreme reliability
The parallel-kinematic arrangement enables the hexapod to perform motion in 6 axes in an extremely compact design. Thanks to the use of brushless DC motors and its stiff mechanical design, the H-811 offers the dynamics required for active alignment applications, even if external interference (e.g., in the case of gluing processes) occurs. Extensive software tools provide support by simplifying the system tuning and making automatic routines available for alignment to an external analog control signal.
Motion simulation for protecting the overall system
The PIVirtualMove software, which can be downloaded free of charge, simulates the travel range, the alignment, and the permissible forces and torques of the H-811 to facilitate an optimum system configuration. In this context, both the chosen center of rotation and the center of gravity of the load are taken into consideration.
Work and tool coordinate systems and an emulation tool are included in the free software package belonging to the scope of delivery of the hexapod controller. The tools provided help to protect critical components such as optical or photonic parts.
Specifications
Specifications
| Travel range [mm] | 50, 100, 150, 200, 250, or 300 | |||||||
|---|---|---|---|---|---|---|---|---|
| Drive type | DC motor | Stepper motor | ||||||
| Spindle Pitch [mm] | 1 | 2 | 5 | 1 | 2 | 5 | ||
| Maximum velocity in X, unloaded [mm/s] | ||||||||
| Acceleration [mm/s²] | ||||||||
| Minimum incremental motion in X [nm] | Encoder | 1 V pp | ||||||
| RS-422 | ||||||||
| Rot. | ||||||||
| None | ||||||||
| Unidirectional repeatability in X [µm] | Encoder | 1 V pp | ||||||
| RS-422 | ||||||||
| Rot. | ||||||||
| None | ||||||||
| Bidirectional repeatability in X [µm] | Encoder | 1 V pp | ||||||
| RS-422 | ||||||||
| Rot. | ||||||||
| None | ||||||||
| Sensor resolution [µm] | Encoder | 1 V pp | ||||||
| RS-422 | ||||||||
| Rot. | ||||||||
| None | ||||||||
| Drive force in direction of motion in X [N] | ||||||||
| Holding force in X, passive [N] | ||||||||
| Permissible force in X [N] | ||||||||
| Permissible force in Y [N] | ||||||||
| Permissible torque in θX [Nm] | ||||||||
| Permissible torque in θY [Nm] | ||||||||
| Permissible torque in θZ [Nm] | ||||||||
| Permissible force in Z [N] | ||||||||
| Travel range in X [mm] | 50 | 100 | 150 | 200 | 250 | 300 | ||
| Flatness (linear crosstalk in Z with motion in X) [µm] | ||||||||
| Straightness (linear crosstalk in Y with motion in X) [µm] | ||||||||
| Yaw (rotational crosstalk in θZ with motion in X) [µrad] | ||||||||
| Pitch (rotational crosstalk in θY with motion in X( [µrad] | ||||||||
| Holding brake | Optional for DC motor – holding force XY | |||||||
| Drive screw type | ||||||||
| Guide | ||||||||
| Connector | ||||||||
| Operating temperature range | ||||||||
| Degree of protection | ||||||||
| Recommended controllers/drivers |
| |||||||
| Crosstalks | ||||||||
| Travel range in X [mm] | 50 | 100 | 150 | 200 | 250 | 300 | ||
| Flatness (linear crosstalk in Z with motion in X) [µm] | ||||||||
| Straightness (linear crosstalk in Y with motion in X) [µm] | ||||||||
| Yaw (rotational crosstalk in θZ with motion in X) [µrad] | ||||||||
| Pitch (rotational crosstalk in θY with motion in X) [µrad] | ||||||||
CPQ
Application fields
Thanks to its small footprint and its proven reliability in applications with high numbers of cycles, the H-811 is typically employed in photonics and in precision assembly. In such areas, it contributes to boosting the productivity of complex manufacturing processes and measuring procedures.
High dynamics combined with extreme reliability
The parallel-kinematic arrangement enables the hexapod to perform motion in 6 axes in an extremely compact design. Thanks to the use of brushless DC motors and its stiff mechanical design, the H-811 offers the dynamics required for active alignment applications, even if external interference (e.g., in the case of gluing processes) occurs. Extensive software tools provide support by simplifying the system tuning and making automatic routines available for alignment to an external analog control signal.
Motion simulation for protecting the overall system
The PIVirtualMove software, which can be downloaded free of charge, simulates the travel range, the alignment, and the permissible forces and torques of the H-811 to facilitate an optimum system configuration. In this context, both the chosen center of rotation and the center of gravity of the load are taken into consideration.
Work and tool coordinate systems and an emulation tool are included in the free software package belonging to the scope of delivery of the hexapod controller. The tools provided help to protect critical components such as optical or photonic parts.
Downloads
製品についての注意事項
Product Change Notification Hexapod Cables
Product Change Notification Motor Driven Products
Product Change Notification H-811 Series
Product Change Notification H-811 Vent Holes
Product Change Notification H-811.D2, H-811.D11, H-811.D12
データシート
ドキュメント
3D モデル
H-811.I2 3D Model
ソフトウェア ファイル
PIVirtualMove
見積取得方法
応用事例

Sample Adjustment
At Diamond Light Source, UK, beamline I07 is a high-resolution X-ray diffraction beamline dedicated to investigate the structure of surfaces and interfaces.

フォトニクスパッケージング
TEGEMAのフォトニック回路の組み立てとパッケージングのためのモジュラプラットフォームは、PIのナノポジショニングの専門知識に基づいています。

High Vacuum Positioning
Investigation of the structural properties of thin films under high-vacuum conditions.

ナノトモグラフィー
ハンブルクにあるDESY研究センターのX線源PETRA IIIに、イメージングビームラインP05があります。

寸法測定における柔軟性
モーションロボティクスに必要な空間を最小化することにより、ヘキサポッドはインラインオートメーションシステムの様々な例において優れた柔軟性をもたらします。























