Travel range [mm]50, 100, 150, 200, 250, or 300
Drive typeDC motorStepper motor
Spindle Pitch [mm]125125
Maximum velocity in X, unloaded [mm/s]      
Acceleration [mm/s²]      
Minimum incremental motion in X [nm]Encoder1 Vpp      
RS-422      
Rot.      
None      
Unidirectional repeatability in X [µm]Encoder1 Vpp      
RS-422
Rot.
None
Bidirectional repeatability in X [µm]Encoder1 Vpp      
RS-422
Rot.
None
Sensor resolution [µm]Encoder1 Vpp      
RS-422
Rot.
None
Drive force in direction of motion in X [N]      
Holding force in X, passive [N]      
Permissible force in X [N]      
Permissible force in Y [N]      
Permissible torque in θX [Nm]      
Permissible torque in θY [Nm]      
Permissible torque in θZ [Nm]      
Permissible force in Z [N]      
Travel range in X [mm]50100150200250300
Flatness (linear crosstalk in Z with motion in X) [µm]      
Straightness (linear crosstalk in Y with motion in X) [µm]      
Yaw (rotational crosstalk in θZ with motion in X) [µrad]      
Pitch (rotational crosstalk in θY with motion in X( [µrad]      
Holding brakeOptional for DC motor – holding force XY
Drive screw type        
Guide        
Connector        
Operating temperature range        
Degree of protection        
Recommended controllers/drivers
  • Most cost effective
  • Most dynamic
  • Modular platform (E-713/E-500)
Crosstalks
Travel range in X [mm]50100150200250300
Flatness (linear crosstalk in Z with motion in X) [µm]      
Straightness (linear crosstalk in Y with motion in X) [µm]      
Yaw (rotational crosstalk in θZ with motion in X) [µrad]      
Pitch (rotational crosstalk in θY with motion in X) [µrad]      

H-815 Hexapod for Industrial 24/7 Applications with Highest Precision Requirements

Compact, Robust, and Precise

  • Integrated brakes for safe handling and high process reliability
  • Fast system start thanks to position data without referencing due to absolute encoders
  • Robust design for long service life with high duty cycles
  • High throughput thanks to long-term reliability
  • Compact design for easy integration
  • Easy cable management with pluggable cables
  • High precision thanks to exceptional design and high-quality components

Stewart platform for high loads and 24/7 operation

The H-815 is characterized by its exceptional reliability, high velocity, and precise motion, making it ideal for applications in silicon photonics, semiconductor manufacturing, optics, and metrology. Its combination of precision, flexibility, and durability makes it the ideal tool for modern, high-precision alignment tasks. The H-815 Industrial Hexapod is a compact, robust parallel-kinematic motion system designed for 24/7 operation in industrial environments.

Highest Robustness in Compact Installation Space

The parallel-kinematic arrangement enables the H-815 to perform motion in 6 axes in an extremely compact design. Thanks to its low-profile design (155 mm in height with a 222 mm diameter base plate) and payload and load capacity of up to 10 kg, the hexapod can be seamlessly integrated into existing production lines, enabling reliable positioning and consistent performance in different orientations. The Industrial Hexapod reaches velocities of up to 20 mm/s and offers high precision: minimum incremental motion of 0.05 µm and repeatability to ±0.05 µm. The maximum travel range is ±20 mm in the linear axes and ±16° in the rotary axes. Thanks to its integrated brakes, the H-815 offers maximum safety and robustness in a compact installation space. The absolute encoder enables immediate operation without a referencing move, increasing efficiency and process reliability with high positioning accuracy.