Application fields
Thanks to its small footprint, the vacuum variant of the H-811 is well suited for installation in vacuum chambers. Its high level of precision enables the H-811.I2V to execute alignment processes extremely precisely and efficiently. In such areas, it makes a significant contribution to boosting the productivity of complex manufacturing processes and measuring procedures.
High dynamics combined with extreme reliability
The parallel-kinematic arrangement enables the hexapod to perform motion in 6 axes in an extremely compact design. Thanks to the use of brushless DC motors and its stiff mechanical design, the H-811 offers the dynamics required for active alignment applications, even if external interference (e.g., in the case of gluing processes) occurs. Extensive software tools provide support by simplifying the system tuning and making automatic routines available for alignment to an external analog control signal.
Motion simulation for protecting the overall system
The PIVirtualMove software, which can be downloaded free of charge, simulates the travel range, the alignment, and the permissible forces and torques of the H-811 to facilitate an optimum system configuration. In this context, both the chosen center of rotation and the center of gravity of the load are taken into consideration.
Work and tool coordinate systems and an emulation tool are included in the free software package belonging to the scope of delivery of the hexapod controller. The tools provided help to protect critical components such as optical or photonic parts.
| Motion | H-811.I2V | Tolerance |
|---|---|---|
| Active axes | X ǀ Y ǀ Z ǀ θX ǀ θY ǀ θZ | |
| Travel range in X | ± 17 mm | |
| Travel range in Y | ± 16 mm | |
| Travel range in Z | ± 6.5 mm | |
| Rotation range in θX | ± 10 ° | |
| Rotation range in θY | ± 10 ° | |
| Rotation range in θZ | ± 21 ° | |
| Maximum velocity in X | 10 mm/s | |
| Recommended velocity in X | 5 mm/s | |
| Maximum velocity in Y | 10 mm/s | |
| Recommended velocity in Y | 5 mm/s | |
| Maximum velocity in Z | 10 mm/s | |
| Recommended velocity in Z | 5 mm/s | |
| Maximum angular velocity in θX | 250 mrad/s | |
| Recommended angular velocity in θX | 120 mrad/s | |
| Maximum angular velocity in θY | 250 mrad/s | |
| Recommended angular velocity in θY | 120 mrad/s | |
| Maximum angular velocity in θZ | 250 mrad/s | |
| Recommended angular velocity in θZ | 120 mrad/s | |
| Positioning | H-811.I2V | Tolerance |
| Minimum incremental motion in X | 0.2 µm | typ. |
| Minimum incremental motion in Y | 0.2 µm | typ. |
| Minimum incremental motion in Z | 0.08 µm | typ. |
| Minimum incremental motion in θX | 2.5 µrad | typ. |
| Minimum incremental motion in θY | 2.5 µrad | typ. |
| Minimum incremental motion in θZ | 5 µrad | typ. |
| Unidirectional repeatability in X | ± 0.15 µm | typ. |
| Unidirectional repeatability in Y | ± 0.15 µm | typ. |
| Unidirectional repeatability in Z | ± 0.06 µm | typ. |
| Unidirectional repeatability in θX | ± 2 µrad | typ. |
| Unidirectional repeatability in θY | ± 2 µrad | typ. |
| Unidirectional repeatability in θZ | ± 3 µrad | typ. |
| Backlash in X | 0.2 µm | typ. |
| Backlash in Y | 0.2 µm | typ. |
| Backlash in Z | 0.06 µm | typ. |
| Backlash in θX | 2 µrad | typ. |
| Backlash in θY | 2 µrad | typ. |
| Backlash in θZ | 4 µrad | typ. |
| Drive Properties | H-811.I2V | Tolerance |
| Drive type | Brushless DC motor | |
| Mechanical Properties | H-811.I2V | Tolerance |
| Stiffness in X | 0.7 N/µm | |
| Stiffness in Y | 0.7 N/µm | |
| Stiffness in Z | 8 N/µm | |
| Maximum load capacity, base plate in any orientation | 2.5 kg | |
| Maximum load capacity, base plate horizontal | 5 kg | |
| Maximum holding force, base plate in any orientation | 2.5 N | |
| Maximum holding force, base plate horizontal | 15 N | |
| Overall mass | 2.2 kg | |
| Material | Stainless steel, aluminum | |
| Miscellaneous | H-811.I2V | Tolerance |
| Operating temperature range | 0 to 50 °C | |
| Vacuum class | 10⁻⁶ ǀ hPa | |
| Maximum bakeout temperature | 80 °C | |
| Connector for data transmission | HD D-sub 78 (m) | |
| Connector for supply voltage | LEMO | |
| Cable length | 2 m | |
| Outer diameter power supply cable | 4.7 mm | |
| Minimum bending radius for fixed installation, power supply | 50 mm | |
| Outer diameter data transmission cable | 6.6 mm | |
| Minimum bending radius for fixed installation, data transmission | 70 mm | |
| Recommended controllers/drivers | C-887.5x |
The cables fixed to the H-811.I2V are not drag chain compatible.
Note on outer diameter data transmission cable: The data transmission connection consists of 2 cables that end in one connector. The specified diameter applies for each cable.
Air-side connecting cables are not included in the scope of delivery and must be ordered separately.
With continuous operation in a vacuum, heat generation may necessitate limiting the operating parameters.
When measuring position specifications, typical velocity is used. The data is included in the delivery of the product in the form of a measurement report and is stored at PI.
The maximum travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis shows its maximum travel range when all other axes are in the zero position of the nominal travel range and the default coordinate system is in use, or rather when the pivot point is set to 0,0,0.
At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
Miniature hexapod; BLDC motor; vacuum compatible to 10-6hPa; 5 kg payload; 10 mm/s velocity; 2 m cable length (vacuum side); feedthroughs. Air-side connecting cables are not included in the scope of delivery and must be ordered separately.
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At Diamond Light Source, UK, beamline I07 is a high-resolution X-ray diffraction beamline dedicated to investigate the structure of surfaces and interfaces.
ハンブルクにあるDESYのP05イメージングビームラインは、HZGによって運用されています。
Investigation of the structural properties of thin films under high-vacuum conditions.
Sample Manipulators in High-Vacuum
