The hexapods suitable for vacuum of the H-850 series position loads of up to 80 kg with high precision and reliability. Heavy-duty precision bearings allow applications with long duty cycles.
The H-850.V are suitable for vacuum environments to 10-6 hPa.
The parallel-kinematic design for six degrees of freedom makes it significantly more compact and stiffer than comparable serial kinematic systems. The advantages over serial, i.e., stacked systems, are mainly the much better path accuracy and repeatability. In addition, the moved mass is lower and allows improved dynamics which is the same for all motion axes. Cable management is not a problem because cables are not moved.
PIVirtualMove
The simulation software simulates the limits of the workspace and load capacity of a hexapod. Therefore, even before purchasing, you can check whether a particular hexapod model can handle the loads, forces, and torques occurring in an application. For this purpose, the simulation tool takes the position and motion of the hexapod as well as the pivot point and several reference coordinate systems into account.
Application fields
Industry and research. For astronomy, optics positioning, aerospace.
| Motion | H-850.G2V | H-850.H2V | Tolerance |
|---|---|---|---|
| Active axes | X ǀ Y ǀ Z ǀ θX ǀ θY ǀ θZ | X ǀ Y ǀ Z ǀ θX ǀ θY ǀ θZ | |
| Travel range in X | ± 50 mm | ± 50 mm | |
| Travel range in Y | ± 50 mm | ± 50 mm | |
| Travel range in Z | ± 25 mm | ± 25 mm | |
| Rotation range in θX | ± 15 ° | ± 15 ° | |
| Rotation range in θY | ± 15 ° | ± 15 ° | |
| Rotation range in θZ | ± 30 ° | ± 30 ° | |
| Maximum velocity in X | 2.5 mm/s | 0.15 mm/s | |
| Maximum velocity in Y | 2.5 mm/s | 0.15 mm/s | |
| Maximum velocity in Z | 2.5 mm/s | 0.15 mm/s | |
| Maximum angular velocity in θX | 30 mrad/s | 1.8 mrad/s | |
| Maximum angular velocity in θY | 30 mrad/s | 1.8 mrad/s | |
| Maximum angular velocity in θZ | 30 mrad/s | 1.8 mrad/s | |
| Typical velocity in X | 2 mm/s | 0.1 mm/s | |
| Typical velocity in Y | 2 mm/s | 0.1 mm/s | |
| Typical velocity in Z | 2 mm/s | 0.1 mm/s | |
| Typical angular velocity in θX | 25 mrad/s | 1.2 mrad/s | |
| Typical angular velocity in θY | 25 mrad/s | 1.2 mrad/s | |
| Typical angular velocity in θZ | 25 mrad/s | 1.2 mrad/s | |
| Positioning | H-850.G2V | H-850.H2V | Tolerance |
| Minimum incremental motion in X | 1 µm | 0.3 µm | typ. |
| Minimum incremental motion in Y | 1 µm | 0.3 µm | typ. |
| Minimum incremental motion in Z | 0.5 µm | 0.2 µm | typ. |
| Minimum incremental motion in θX | 7.5 µrad | 3 µrad | typ. |
| Minimum incremental motion in θY | 7.5 µrad | 3 µrad | typ. |
| Minimum incremental motion in θZ | 15 µrad | 5 µrad | typ. |
| Unidirectional repeatability in X | ± 0.5 µm | ± 0.5 µm | typ. |
| Unidirectional repeatability in Y | ± 0.5 µm | ± 0.5 µm | typ. |
| Unidirectional repeatability in Z | ± 0.2 µm | ± 0.2 µm | typ. |
| Unidirectional repeatability in θX | ± 3 µrad | ± 3 µrad | typ. |
| Unidirectional repeatability in θY | ± 3 µrad | ± 3 µrad | typ. |
| Unidirectional repeatability in θZ | ± 7.5 µrad | ± 9 µrad | typ. |
| Backlash in X | 6 µm | 4 µm | typ. |
| Backlash in Y | 6 µm | 4 µm | typ. |
| Backlash in Z | 1.5 µm | 0.5 µm | typ. |
| Backlash in θX | 25 µrad | 7.5 µrad | typ. |
| Backlash in θY | 25 µrad | 7.5 µrad | typ. |
| Backlash in θZ | 90 µrad | 60 µrad | typ. |
| Integrated sensor | Incremental rotary encoder | Incremental rotary encoder | |
| Drive Properties | H-850.G2V | H-850.H2V | Tolerance |
| Drive type | DC gear motor with ActiveDrive | DC gear motor with ActiveDrive | |
| Nominal voltage | 24 V | 24 V | |
| Mechanical Properties | H-850.G2V | H-850.H2V | Tolerance |
| Stiffness in X | 7 N/µm | 7 N/µm | |
| Stiffness in Y | 7 N/µm | 7 N/µm | |
| Stiffness in Z | 100 N/µm | 100 N/µm | |
| Maximum load capacity, base plate in any orientation | 10 kg | 40 kg | |
| Maximum load capacity, base plate horizontal | 25 kg | 80 kg | |
| Maximum holding force, base plate in any orientation | 85 N | 500 N | |
| Maximum holding force, base plate horizontal | 250 N | 2000 N | |
| Drive screw type | Ball screw | Ball screw | |
| Overall mass | 17 kg | 17 kg | |
| Material | Aluminum | Aluminum | |
| Miscellaneous | H-850.G2V | H-850.H2V | Tolerance |
| Operating temperature range | -10 to 50 °C | -10 to 50 °C | |
| Vacuum class | 10⁻⁶ ǀ hPa | 10⁻⁶ ǀ hPa | |
| Maximum bakeout temperature | 80 °C | 80 °C | |
| Connector for data transmission | HD D-sub 78 (m) | HD D-sub 78 (m) | |
| Connector for supply voltage | M12 4-pole (m) | M12 4-pole (m) | |
| Cable length | 2 m | 2 m | |
| Recommended controllers / drivers | C-887.5xx | C-887.5xx |
H-850 Hexapod Microrobot with Excellent Position Repeatability
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
Precision Hexapod microrobot, DC gear motor, rotary encoder, 25 kg load capacity, 2.5 mm/s velocity, vacuum compatible to 10-6 hPa, cable set 2 m vacuum side, feedthrough. Air side connecting cables are not included in the scope of delivery and must be ordered separately.
Precision Hexapod microrobot, DC gear motor, rotary encoder, 80 kg load capacity, 0.15 mm/s velocity, vacuum compatible to 10-6 hPa, cable set 2 m vacuum side, feedthrough. Air side connecting cables are not included in the scope of delivery and must be ordered separately.
At Diamond Light Source, UK, beamline I07 is a high-resolution X-ray diffraction beamline dedicated to investigate the structure of surfaces and interfaces.
ハンブルクにあるDESYのP05イメージングビームラインは、HZGによって運用されています。
Positioning the Vacuum Chamber for X-ray Diffraction Experiment
Sample Manipulators in High-Vacuum
