Miniature Tip/Tilt Mirror with Ultrasonic Drive
Precise Two-Axis Beam Steering in a Compact Design
Precise laser beam deflection plays a decisive role in many applications. In addition to requiring the widest possible angular range, fields such as optical communication and quantum technologies are increasingly seeking ways to minimize the size of mirror systems. Miniature tip/tilt mirror systems address both demands equally well: Their ultrasonic drives enable large travel ranges while occupying very little space. This innovative drive concept delivers silent motion in two degrees of freedom. The pivot point is positioned exactly at the center of the mirror surface, ensuring exceptionally precise and repeatable tip/tilt motion with no translational offset. As a result, the technology delivers excellent positioning quality in a footprint that was previously only attainable with significantly reduced travel ranges.
Large Travel Ranges in a Compact Design

Large Travel Ranges in a Compact Design
The ultrasonic drive is the centerpiece of the new miniature tip/tilt mirror. This piezoelectric drive technology makes it possible to achieve large travel ranges and tip/tilt angles—all in a design that is substantially smaller and lighter than conventional electromagnetic or piezo solutions.
Self-Locking and High Mechanical Stiffness

Self-Locking and High Mechanical Stiffness
The piezo-based ultrasonic drive delivers high dynamic performance along with inherent self-locking capability. This keeps the desired tip/tilt angle firmly in place without the need for continuous power—a major advantage for energy-efficient and mobile systems. Thanks to the high mechanical stiffness, the system enables fast, precise positioning and high robustness.

This ultrasonic drive concept allows us to deliver large tip/tilt angles with exceptional precision in an ultracompact, self-locking design—something that wasn’t feasible with conventional mirror technologies.
Mathias Winter, Head of Piezo Drives & Systems Technology
Ultrasonic Tip/Tilt Mirror: Today’s Technology, Tomorrow’s Potential
The two-axis miniature tip/tilt mirror is ideally suited for optical precision applications where beam steering and alignment are a priority. Typical use cases range from high-precision laser beam steering to 2DoF beam adjustment in compact optical setups. Unlike traditional fast steering mirrors (FSM) that prioritize high-frequency oscillation suppression, these applications focus on precise and stable positioning with minimal power consumption and completely silent operation.
The design can be further scaled and customized—for larger mirrors, greater tip/tilt angles, or specific integration into optical modules. Given these features, this technology holds the potential to set new standards for ultracompact, high-precision beam steering solutions.
Our miniature ultrasonic tip/tilt mirror can be scaled and tailored to your optical system. Talk to our engineers about your specific requirements.
Contact us!

